JPH0167734U - - Google Patents
Info
- Publication number
- JPH0167734U JPH0167734U JP1987162188U JP16218887U JPH0167734U JP H0167734 U JPH0167734 U JP H0167734U JP 1987162188 U JP1987162188 U JP 1987162188U JP 16218887 U JP16218887 U JP 16218887U JP H0167734 U JPH0167734 U JP H0167734U
- Authority
- JP
- Japan
- Prior art keywords
- resist
- temperature sensor
- temperature
- nozzle
- spinner head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162188U JPH0167734U (en]) | 1987-10-23 | 1987-10-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162188U JPH0167734U (en]) | 1987-10-23 | 1987-10-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0167734U true JPH0167734U (en]) | 1989-05-01 |
Family
ID=31445789
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987162188U Pending JPH0167734U (en]) | 1987-10-23 | 1987-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0167734U (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000223394A (ja) * | 1999-01-29 | 2000-08-11 | Dainippon Screen Mfg Co Ltd | 基板処理装置及び基板処理方法 |
| JP2001291660A (ja) * | 2000-04-11 | 2001-10-19 | Tokyo Electron Ltd | 膜形成方法及び膜形成装置 |
-
1987
- 1987-10-23 JP JP1987162188U patent/JPH0167734U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000223394A (ja) * | 1999-01-29 | 2000-08-11 | Dainippon Screen Mfg Co Ltd | 基板処理装置及び基板処理方法 |
| JP2001291660A (ja) * | 2000-04-11 | 2001-10-19 | Tokyo Electron Ltd | 膜形成方法及び膜形成装置 |